Semiconductor Chamber Structural Parts
MITO DENKO
Peculiarity
Application：Key components of PVD, CVD, and ETCH chambers in semiconductor processes.
Advantages：1、Corrosion Resistance；2、Insulation；3、Plasma Resistance.
Material Purity：99.7%, 99.8%, 99.9% Alumina.
Dimension Specifications：Disc diameter within φ650mm (or strips up to 2000mm in length).
Processing Methods：Isostatic pressing, sintering, precision machining, etc.
Precision Range：Dimensional tolerance ±0.01mm; flatness up to 0.002mm, surface roughness Ra0.2.
