Microporous Ceramic Vacuum Chuck/carrier
Peculiarity
Advantages:1、High Hardness;2、Rapid Heat Dissipation;3、Excellent Wear Resistance;4、Strong Resistance To Acid, Alkali, And Corrosion, Adaptable To Extremely Harsh Environments.
Application Scenarios:
1、Used as a workbench (fixed fixture) in the semiconductor industry during processes such as wafer thinning, shaping, slicing, grinding, and cleaning.
2、Through high-temperature sintering, a large number of interconnected or closed uniform solid or vacuum ceramic structures are formed within the material. These utilize vacuum
suction to fix semiconductor wafers or other workpieces in place.