Plasma-resistant Components
Peculiarity
Application：200mm and 300mm semiconductor equipment.
Advantages：1、High resistance to plasma corrosion；2、High dielectric strength；3、High corrosion resistance.
categorize：Edge ring、 Focus ring.
Material：High-purity aluminum oxide ceramic materials (A997, A998).
Ceramics have a stable chemical composition and crystalstructure.In a plasma environment, they can resist thebombardment of high-energy particles in the plasma,chemical reactions, and other effects.
